- University of Lodz
- Faculty of Chemistry
- Department of Materials Technology and Chemistry
- Experimental techniques and apparatus
- Sputter coater
Sputter coater
Quorum Q300tt, Quorum Technologies Ltd.
It is used for sputtering non-conductive or weakly conductive substrates with metals and carbon (as part of preparatory work) intended for scanning electron microscopy (SEM) imaging.
The Q300TT sprayer is composed of a chamber and a turbomolecular pump system. It is intended for spraying coatings on substrates with a large diameter up to 200 mm (e.g. Si plate) or several smaller ones of similar diameter together. The sputter is equipped with three individual heads for the deposition of oxidizing metals, e.g. chromium (Cr) and aluminum (Al), as well as non-oxidizing metals, e.g. precious metals, e.g. gold (Au), gold/palladium (Au/Pd). and platinum (Pt).
